Maluf, Nadim.
Introduction to microelectromechanical systems engineering / Nadim Maluf, Kirt Williams.
— 2nd ed. — Boston : Artech House, 2004. xx, 283 p. : il. ; 26 cm. — (Microelectromechanical systems series)
Incluye referencias bibliográficas e índice.
ISBN 1580535909 (alk. paper)
|