Selected papers revised from the Proceedings of the Fifth International Symposium on Sputtering and Plasma Processes (ISSP '99) : 16-18 June 1999, Kanazawa, Japan, organized by Executive Committee of the International Symposium on Sputtering & Plasma Processes; sponsored by the Japan Society of Applied Physics
[guest editors, A. Kinbara ... et. al.].
[Oxford, England] : Pergamon, ©2000.
p. 381-843 : ilustraciones ; 26 cm.
Issued as: Vacuum, v. 59, no. 2-3 (Nov.-Dec. 2000).
"Special issue."
En portada: Guest Editors: T. Hata, H. Biederman.
Incluye referencias bibliográficas.