Catálogo Bibliográfico
LDR | ·····nam##22·····5a#4500 |
001 | 013365 |
005 | 20220818161908.0 |
008 | 070206s1990####xx############100#0#und#d |
245 | 10 | $a Microlitography : $b High integration in microelectronics : proceedings of the first workshop, Rio de Janeiro, Brazil Aug 28-Sept 1, 1989 / $c Editors, Aldo F. Craievich, G. Gerson Bezerra de Souza [y] Victor Baranauskas. |
260 | ## | $a Singapore : $b World Scientific, $c 1990. |
300 | ## | $a viii, 184 p. : $b fig. |
504 | ## | $a Incluye referencias bibliográficas. |
020 | ## | $a 9810201370 |
111 | 2# | $a Workshop Microlitography: High integration in microelectronics $n (1st : $d 1990 : $c Rio de Janeiro, Brazil) |
700 | 1# | $a Craievich, Aldo F., $e ed. $4 edt |
700 | 1# | $a Souza, G. Gerson Bezerra de, $e ed. $4 edt |
700 | 1# | $a Baranauskas, Vitor, $e ed. $4 edt |
080 | ## | $a 621.382 |
650 | #7 | $a Technology utilization. $2 inist |
650 | #7 | $a Semiconductor devices. $2 inist |
650 | #7 | $a Congresses. $2 inist |
650 | #7 | $a Congresos. $2 inist |
040 | ## | $a arbccab $b spa |