Papers presented at the materials research society meeting : Symposium K : Multilevel metal process integration, San Francisco CA. USA, April 1-2, 1997

Guest editors, G. Dixit, R. Fiordalice and R. Mosely.

Amsterdam : Elsevier, 1998.

xiii, 884 págs.

Serie: Thin Solid Films, v. 320, no. 1 0040-6090 ;

Incluye referencias bibliográficas e índices.