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Materials research society meeting Symposium K : Multilevel metal process integration (1997 : San Francisco CA. USA)
Papers presented at the materials research society meeting : Symposium K : Multilevel metal process integration, San Francisco CA. USA, April 1-2, 1997 / Guest editors, G. Dixit, R. Fiordalice and R. Mosely.
— Amsterdam : Elsevier, 1998. xiii, 884 p. — (Thin Solid Films, ISSN 0040-6090 ; v. 320, no. 1)
Incluye referencias bibliográficas e índices.
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