Título/responsables | Semiconductors materials analysis and fabrication process control : Proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992 / edited by G. M. Crean, R. Stuck and J. A. Woollam. |
Publicación |
Amsterdam, Netherlands : North-Holland, 1993. |
Detalles físicos |
xiv, 338 págs. : ilustraciones ; 26 cm. |
Colección | Applied Surface Science 1993, ISSN 0169-4332 ; v. 63, no. 1-4
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Notas |
- En cubierta: Complete Volume.
- "This volume, 'Semiconductors materials analysis and fabrication process control' contains the proceedings of Symposium D of the Spring Meeting of the European Materials Reseach Society, held in Strasbourg, France, from 2-5 june 1992, concurrently with the International Conference on Electronic Materials."—pref.
- Incluye referencias bibliográficas e índice.
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Temas |
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Nombres |
Crean, G. M. Stuck, R. Woollam, J. A. |
Entidades |
European Materials Reseach Society. Spring Meeting (1992 : Strasbourg, France) |
Reunión |
Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control (1992 : Strasbourg, France) |
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