Papers presented at the materials research society meeting : Symposium K : Multilevel metal process integration, San Francisco CA. USA, April 1-2, 1997
Guest editors, G. Dixit, R. Fiordalice and R. Mosely.
Amsterdam : Elsevier, 1998.
xiii, 884 págs.
Serie: Thin Solid Films, v. 320, no. 1 0040-6090 ;
Incluye referencias bibliográficas e índices.