Catálogo Bibliográfico
LDR | ·····nam##22·····5a#4500 |
001 | 013840 |
005 | 20070223070856.0 |
008 | 070223s1998####ne############101#0#eng#d |
245 | 10 | $a Papers presented at the materials research society meeting : $b Symposium K : Multilevel metal process integration, San Francisco CA. USA, April 1-2, 1997 / $c Guest editors, G. Dixit, R. Fiordalice and R. Mosely. |
260 | ## | $a Amsterdam : $b Elsevier, $c 1998. |
300 | ## | $a xiii, 884 p. |
504 | ## | $a Incluye referencias bibliográficas e índices. |
111 | 2# | $a Materials research society meeting $p Symposium K : Multilevel metal process integration $d (1997 : $c San Francisco CA. USA) |
080 | ## | $a 669:061.3 |
650 | #7 | $a Metals. $2 inist |
650 | #7 | $a Metales. $2 inist |
650 | #7 | $a Congresos. $2 inist |
650 | #7 | $a Congresses. $2 inist |
700 | 1# | $a Dixit, G., $e ed. $4 edt |
700 | 1# | $a Fiordalice, R., $e ed. $4 edt |
700 | 1# | $a Mosely, R., $e ed. $4 edt |
490 | 1# | $a Thin Solid Films, $v v. 320, no. 1 $x 0040-6090 ; |
040 | ## | $a arbccab $b spa |