New trends in ion beam processing from ions and cluster ion beams to engineering issues : proceedings of the E-MRS '95 Spring Meeting Symp. J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation, Symp. C on Pushing the Limits of Ion Beam Processing - From Engineering to Atomic Scale Issues, Strasbourg, France, May 22-26, 1995

editors, Peter L. F. Hemment, Jean-Paul Thomas.

Amsterdam : North-Holland, 1996.

xv, 355 págs. : ilustraciones ; 27 cm.

Serie: Nuclear instruments & methods in physics research. Section B v. 112 0168-583X ;

Título de cubierta: Proceedings of the E-MRS '95 Symp. J + C on New Trends in Ion Beam Processing From Ions and Cluster Ion Beams to Engineering Issues, Strasbourg, France, May 22-26, 1995.

Incluye índice.