Selected papers revised from the Proceedings of the Fifth International Symposium on Sputtering and Plasma Processes (ISSP '99) : 16-18 June 1999, Kanazawa, Japan, organized by Executive Committee of the International Symposium on Sputtering & Plasma Processes; sponsored by the Japan Society of Applied Physics

[guest editors, A. Kinbara ... et. al.].

[Oxford, England] : Pergamon, ©2000.

p. 381-843 : ilustraciones ; 26 cm.

Issued as: Vacuum, v. 59, no. 2-3 (Nov.-Dec. 2000).

"Special issue."

En portada: Guest Editors: T. Hata, H. Biederman.

Incluye referencias bibliográficas.