Papers presented at the joint symposium on plasma science for materials and the 4th Asia-Pacific Conference on plasma science & technology : Coogee, sydney, NSW, Australia, 27-29 July 1998

Guest editors, T. Yoshida ... [et al.].

Amsterdam : Elsevier, 1999.

vii, 184 págs.

Serie: Thin Solid Films, v. 345, no. 1 0040-6090 ;

Incluye referencias bibliográficas e índices.