Handbook of microlithography, micromachining, and microfabrication
P. Rai-Choudhury, editor.
Bellingham, Wash., USA : SPIE Optical Engineering Press, ©1997.
2 vols. : ilustraciones ; 26 cm.
Serie: IEE materials and devices series ; 12A-12B
ISBN: 0819423785 (v. 1)
Incluye referencias bibliográficas e índice.
La biblioteca posee: v. 1.
Contenido
- v. 1. Microlithography
- v. 2. Micromachining and microfabrication.
