Catálogo Bibliográfico
LDR | ·····cam##22·····4a#4500 |
001 | 014349 |
005 | 20100630160153.0 |
008 | 010801s2002####flua###f#b####001#0#eng## |
245 | 10 | $a Fundamentals of microfabrication : $b the science of miniaturization / $c Marc J. Madou. |
250 | ## | $a 2nd ed. |
260 | ## | $a Boca Raton : $b CRC Press, $c c2002. |
300 | ## | $a 723 p. : $b col. il. ; $c 29 cm. |
504 | ## | $a Incluye referencias bibliográficas e índices. |
020 | ## | $a 0849308267 (alk. paper) |
100 | 1# | $a Madou, Marc J. |
080 | ## | $a 621.3.04 |
082 | 00 | $a 621.3815/2 $2 21 |
650 | #0 | $a Microelectronics. |
650 | #0 | $a Integrated circuits $x Design and construction. |
650 | #0 | $a Microelectromechanical systems $x Design and construction. |
650 | #0 | $a Machining. |
650 | #0 | $a Microelectronic packaging. |
650 | #0 | $a Lasers $x Industrial applications. |
010 | ## | $a ##2001043273 |
050 | 00 | $a TK7836 $b .M33 2002 |
040 | ## | $a DLC $c DLC $d DLC $b spa $d arbccab |
856 | 42 | $3 Reseña $u http://www.loc.gov/catdir/enhancements/fy0646/2001043273-d.html |