Catálogo Bibliográfico
LDR | ·····cam##22·····4a#4500 |
001 | 009386 |
005 | 20100205164423.0 |
008 | 981118s2009####ne#a###f#b####101#0#eng## |
245 | 10 | $a Dielectric thin films for future ULSI devices : $b science and technology, Tokyo, November 5-7, 2008. |
260 | ## | $a Tokyo : $b The Japan Society of Applied Physics, $c 2009. |
300 | ## | $a p. : $b il. ; $c 30 cm. |
504 | ## | $a Incluye referencias bibliográficas. |
111 | 2# | $a International Workshop on Dielectric Thin Films for Future ULSI Devices $d (2008 : $c Tokyo) |
080 | ## | $a 669.2/8.69:061.3 |
080 | ## | $a 539.23:061.3 |
650 | #0 | $a Thin films $v Congresses. |
040 | ## | $a arbccab $b spa |
500 | ## | $a Incluye indices. |