QC100 .U57 no. 337
621.3815/2
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Symposium on Silicon Device Processing (1970 : Gaithersburg, Md.)
Silicon device processing ; proceedings / Charles P. Marsden, editor.
— Washington : U.S. National Bureau of Standards; for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1970. x, 457 p. : il. ; 27 cm. — (NBS special publication ; 337)
"A United States Department of Commerce publication."
"CODEN: XNBSA."
"Held ... under the sponsorship of Committee F-1 of the American Society for Testing and Materials and the National Bureau of Standards."
Incluye referencias bibliográficas.
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