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TJ940 .J669
621.5/5/05
Journal of vacuum science & technology. B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society.
— New York, N.Y. : Published for the Society by the American Institute of Physics, 1983-c1990.
8 v. : il. ; 29 cm.
Includes: International Symposium on Electron, Ion, and Photon Beams. Proceedings of the ... International Symposium on Electron, Ion, and Photon Beams; and: Molecular Beam Epitaxy Workshop. Proceedings of the ... Molecular Beam Epitaxy Workshop, also issued separately.
Title from cover.
ISSN 0734-211X