Mechanical properties of MEMS structures.

Norwell, MA : Kluwer, 2003.

v, 4073-4235 págs.

Serie: Journal of materials science, v. 38, no. 20 (2003) 0022-2461 ;

"The papers were presented in the Materials Sessions at the ASME Symposium on the Mechanical Properties of the MEMS Structures, which was held in New York, NY, in november of 2001".

Incluye referencias bibliográficas.