Handbook of microlithography, micromachining, and microfabrication / P. Rai-Choudhury, editor.
— Bellingham, Wash., USA : SPIE Optical Engineering Press, c1997. 2 v. : il. ; 26 cm. — (IEE materials and devices series ; 12A-12B)
Incluye referencias bibliográficas e índice.
Contenido: v. 1. Microlithography — v. 2. Micromachining and microfabrication.
ISBN 0819423785 (v. 1)
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