The Journal of vacuum science and technology.
Vol. 1, no. 1 (Sept./Oct. 1964) –v. 21, no. 4 (Nov./Dec. 1982).
[New York, N.Y.] : Published for the American Vacuum Society by the American Institute of Physics, [1964-1982]
21 vols. : ilustraciones ; 28 cm.
ISSN: 0022-5355
Split into: Journal of vacuum science & technology. A, Vacuum, surfaces and films, and: Journal of vacuum science & technology. B, Microelectronics processing and phenomena.
Title varies slightly.
Title from cover.
Also issued on microfilm.
Reseña: Chemical abstracts
La biblioteca posee:
| Nros. ordinarios: | 1964, 1 (1,2); 1965-1982, 2-21. |
