Catálogo Bibliográfico
LDR | ·····nam##22·····5a#4500 |
001 | 013677 |
005 | 20070215125613.0 |
008 | 070215s1997####ja############100#0#eng#d |
245 | 10 | $a Dry process / $c edited by Yasuhiro Horiike ... [et al.]. |
260 | ## | $a Tokyo, Japan : $b JJAP, $c 1997. |
300 | ## | $a 2435-2567 p. |
520 | ## | $a "... papers presented at the 18th Dry Process Symposium (DPS´96) which was held in the Waseda Univerity International Conference Center Tokyo, November 5th to 6th, 1996 ...". -- foreword |
111 | 2# | $a Dry Process Symposium $n (18th : $d 1996 : $c Waseda Univerity International Conference Center Tokyo) |
080 | ## | $a 533.924:061.3 |
650 | #7 | $a Plasma. $2 inist |
650 | #7 | $a Etching. $2 inist |
650 | #7 | $a Congresses. $2 inist |
650 | #7 | $a Congresos. $2 inist |
700 | 1# | $a Horiike, Yasuhiro, $e ed. $4 edt |
490 | 1# | $a Japanese Journal of Applied Physics. Part 1 : Regular papers, short notes & review papers, $v v. 36, no. 4B $x 0021-4922 ; |
040 | ## | $a arbccab $b spa |