Catálogo Bibliográfico
LDR | ·····nam##22·····5a#4500 |
001 | 015949 |
005 | 20100205164939.0 |
008 | 100205s2009####ja#a##########100#0#eng#d |
245 | 10 | $a Recent advances in the dry process and related technologies. |
260 | ## | $a Tokyo, Japan : $b The Japan Society of Applied Physics, $c 2009. |
300 | ## | $a p. : $b il. ; $c 30 cm. |
490 | 1# | $a Japanese Journal of Applied Physics. ; $v v. 48 no. 8, $x 0021-4922 |
111 | 2# | $a International Symposium on Dry Process (DPS $d (2008) |
080 | ## | $a 533.924:061.3 |
650 | #7 | $a Plasma. $2 inist |
650 | #7 | $a Etching. $2 inist |
650 | #7 | $a Congresses. $2 inist |
650 | #7 | $a Congresos. $2 inist |
040 | ## | $a arbccab $b spa |