Catálogo Bibliográfico
1. | Handbook of microlithography, micromachining, and microfabrication / P. Rai-Choudhury, editor. | 1997-1997 | Libro |
621.38
R13 |
2. | Handbook of VLSI microlithography : principles, technology, and applications / edited by William B. Glendinning, John N. Helbert. | 1991 | Libro |
539.23
G485 |