Digest of papers : MicroProcesses and Nanotechnology '97 : 1997 International MicroProcesses and Nanotechnology Conference, July 7-10, 1997, Nagoya, Japan
sponsored by the Japan Society of Applied Physics in cooperation with IEEE Electron Devices Society ... [et al.].
Tokyo, Japan : Business Center for Academic Societies Japan, ©1997.
xx, 238 págs. : ilustraciones ; 28 cm.
Serie: Japanese Journal of Applied Physics ; v. 36, no. 12B (1997)