Handbook of sputter deposition technology : principles, technology, and applications
by Kiyotaka Wasa and Shigeru Hayakawa.
Park Ridge, N.J., U.S.A. : Noyes Publications, ©1992.
xii, 304 págs. : ilustraciones ; 24 cm.
Serie: Materials science and process technology series
ISBN: 0815512805
Incluye referencias bibliográficas e índice.