Ion implantation technology : proceedings of the Seventh International Conference on Ion Implantation Technology, Kyoto, Japan, June 7-10, 1988
edited under the responsibility of T. Takagi ... [et al.].
Amsterdam : North-Holland, 1989.
xxiv, 994 págs. : ilustraciones ; 27 cm.
Serie: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 0168-583X ; v. B37/38 (Feb. 1989)
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