Silicon device processing ; proceedings
Charles P. Marsden, editor.
Washington : U.S. National Bureau of Standards; for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1970.
x, 457 págs. : ilustraciones ; 27 cm.
Serie: NBS special publication ; 337
"A United States Department of Commerce publication."
"CODEN: XNBSA."
"Held ... under the sponsorship of Committee F-1 of the American Society for Testing and Materials and the National Bureau of Standards."
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