Ion implantation technology-94 : proceedings of the Tenth International Conference on Ion Implantation Technology, Catania, Italy, June 13-17, 1994
editors, Salvatore Coffa ... [et al.].
Amsterdam ; New York : North-Holland, 1995.
xvii, 1012 págs. : ilustraciones ; 27 cm.
ISBN: 0444821945 (acid-free paper)
"Part 1 (pp. 1-440) reprinted from: Nuclear instruments and methods in physics research, Section B: Beam interactions with materials and atoms, vol. B96, 1-2"—t.p. verso.
Incluye índice.
Incluye referencias bibliográficas.