Ion implantation : equipment & techniques : proceedings of the Fifth International Conference on Ion Implantation Equipment & Techniques, Smugglers' Notch, Jeffersonville VT, USA, July 23-27, 1984
editors, J.F. Ziegler, R.L. Brown.
Amsterdam : North-Holland, 1985.
xiv, 451 págs. : ilustraciones ; 27 cm.
Serie: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, v. B6, nos. 1, 2 0168-583X ;
Incluye referencias bibliográficas.