Proceedings of the AVS Symposium on Ion Implantation : New Prospects from Materials Modification, 14 June 1978, T. J. Watson Research Center, Yorktown Heights, New York
special editor for the proceedings, W.L. Brown.
New York : Published for the American Vacuum Society by the American Institute of Physics, 1978.
p. 1629-1685 : ilustraciones ; 30 cm.
Serie: Journal of Vacuum Science and Technology ; 5 (1978)
ISBN: 0883182467
Incluye referencias bibliográficas e índice.