Ion implantation into semiconductors, oxides and ceramics : proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics, Strasbourg, France, 16-19 June 1998

editors, Jorg K.N. Lindner ... [et al.].

Amsterdam : North-Holland, 1999.

xiv, 442 págs. : ilustraciones

Serie: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, v. 147, no. 1/4 0168-583X ;

Held under the auspices of the Council of Europe, the Commission of European Communities.