Handbook of sputter deposition technology : principles, technology, and applications

by Kiyotaka Wasa and Shigeru Hayakawa.

Park Ridge, N.J., U.S.A. : Noyes Publications, ©1992.

xii, 304 págs. : ilustraciones ; 24 cm.

Serie: Materials science and process technology series

ISBN: 0815512805

Incluye referencias bibliográficas e índice.