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Wasa, Kiyotaka.
Handbook of sputter deposition technology : principles, technology, and applications / by Kiyotaka Wasa and Shigeru Hayakawa.
— Park Ridge, N.J., U.S.A. : Noyes Publications, c1992. xii, 304 p. : il. ; 24 cm. — (Materials science and process technology series)
Incluye referencias bibliográficas e índice.
ISBN 0815512805
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