Catálogo Bibliográfico
LDR | ·····naa##22·····#a#4500 |
001 | 013385 |
005 | 20070207080458.0 |
008 | 070207s1993####ne#a###f#b####101#0#eng#d |
245 | 10 | $a Semiconductors materials analysis and fabrication process control : $b Proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992 / $c edited by G. M. Crean, R. Stuck and J. A. Woollam. |
260 | ## | $a Amsterdam, Netherlands : $b North-Holland, $c 1993. |
300 | ## | $a xiv, 338 p. : $b il. ; $c 26 cm. |
504 | ## | $a Incluye referencias bibliográficas e índice. |
111 | 2# | $a Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control $d (1992 : $c Strasbourg, France) |
710 | 2# | $a European Materials Reseach Society. $b Spring Meeting (1992 : Strasbourg, France) |
740 | 0# | $a Diaganostic techniques for semiconductor materials analysis. |
080 | ## | $a 621.382:061.3 |
650 | #7 | $a Semiconductor materials. $2 inist |
650 | #0 | $a Technology $v Congresses. |
650 | #7 | $a Materials testing. $2 inist |
650 | #7 | $a Ensayo de materiales. $2 inist |
650 | #7 | $a Congresos. $2 inist |
650 | #7 | $a Materiales semiconductores. $2 inist |
700 | 1# | $a Crean, G. M., $e ed. $4 edt |
700 | 1# | $a Stuck, R., $e ed. $4 edt |
700 | 1# | $a Woollam, J. A., $e ed. $4 edt |
490 | 1# | $a Applied Surface Science 1993, $v v. 63, no. 1-4 $x 0169-4332 ; |
040 | ## | $a arbccab $b spa |
500 | ## | $a En cubierta: Complete Volume. |
500 | ## | $a "This volume, 'Semiconductors materials analysis and fabrication process control' contains the proceedings of Symposium D of the Spring Meeting of the European Materials Reseach Society, held in Strasbourg, France, from 2-5 june 1992, concurrently with the International Conference on Electronic Materials."--pref. |