Journal of vacuum science & technology. B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society.

2nd ser., v. 1, no. 1 (Jan. –Mar. 1983) –2nd ser., v. 8, no. 6 (Nov./Dec. 1990).

New York, N.Y. : Published for the Society by the American Institute of Physics, 1983-©1990.

8 vols. : ilustraciones ; 29 cm.

ISSN: 0734-211X

Continuación parcial de: Journal of vacuum science and technology

Continuado por: Journal of vacuum science & technology. B, Microelectronics and nanometer structures

Includes: International Symposium on Electron, Ion, and Photon Beams. Proceedings of the ... International Symposium on Electron, Ion, and Photon Beams; and: Molecular Beam Epitaxy Workshop. Proceedings of the ... Molecular Beam Epitaxy Workshop, also issued separately.

Title from cover.

Also issued on microfilm.

Reseña: Chemical abstracts