Semiconductors materials analysis and fabrication process control : Proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992

edited by G. M. Crean, R. Stuck and J. A. Woollam.

Amsterdam, Netherlands : North-Holland, 1993.

xiv, 338 págs. : ilustraciones ; 26 cm.

Serie: Applied Surface Science 1993, v. 63, no. 1-4 0169-4332 ;

En cubierta: Complete Volume.

"This volume, 'Semiconductors materials analysis and fabrication process control' contains the proceedings of Symposium D of the Spring Meeting of the European Materials Reseach Society, held in Strasbourg, France, from 2-5 june 1992, concurrently with the International Conference on Electronic Materials."—pref.

Incluye referencias bibliográficas e índice.