Proceedings of the Tenth Annual Conference on the Physics and Chemistry of Semiconductor Interfaces, 25-27 January 1983, Sweeney Convention Center, Santa Fe, New Mexico
sponsored by the American Physical Society ... [et al.] ; special editor for the proceedings: Robert S. Bauer.
New York : American Institute of Physics, 1983.
p. 519-859 : ilustraciones ; 30 cm.
Serie: Journal of vacuum science & technology. B, Microelectronics processing and phenomena, v. 1, no. 3 0734-211X ;
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