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Conference on the Physics and Chemistry of Semiconductor Interfaces (10th : 1983 : Santa Fe, NM)
Proceedings of the Tenth Annual Conference on the Physics and Chemistry of Semiconductor Interfaces, 25-27 January 1983, Sweeney Convention Center, Santa Fe, New Mexico / sponsored by the American Physical Society ... [et al.] ; special editor for the proceedings: Robert S. Bauer.
— New York : American Institute of Physics, 1983. p. 519-859 : il. ; 30 cm. — (Journal of vacuum science & technology. B, Microelectronics processing and phenomena, ISSN 0734-211X ; v. 1, no. 3)
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