Título/responsables | Proceedings of the Tenth Annual Conference on the Physics and Chemistry of Semiconductor Interfaces, 25-27 January 1983, Sweeney Convention Center, Santa Fe, New Mexico / sponsored by the American Physical Society ... [et al.] ; special editor for the proceedings: Robert S. Bauer. |
Publicación |
New York : American Institute of Physics, 1983. |
Detalles físicos |
p. 519-859 : ilustraciones ; 30 cm. |
Colección | Journal of vacuum science & technology. B, Microelectronics processing and phenomena, ISSN 0734-211X ; v. 1, no. 3
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Notas |
- Incluye índice.
- Incluye referencias bibliográficas.
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Temas |
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Nombres |
Bauer, Robert S.
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Entidades |
American Physical Society. American Vacuum Society. |
Reunión |
Conference on the Physics and Chemistry of Semiconductor Interfaces (10th : 1983 : Santa Fe, NM) |
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J. VAC. SCI. TECHNOL. 1983 |
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