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Título/responsables | Journal of vacuum science & technology. B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society. |
Publicación |
New York, N.Y. : Published for the Society by the American Institute of Physics, 1983-©1990. |
Detalles físicos |
8 vols. : ilustraciones ; 29 cm. |
Notas |
- Includes: International Symposium on Electron, Ion, and Photon Beams. Proceedings of the ... International Symposium on Electron, Ion, and Photon Beams; and: Molecular Beam Epitaxy Workshop. Proceedings of the ... Molecular Beam Epitaxy Workshop, also issued separately.
- Also issued on microfilm.
- Title from cover.
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Reseña |
Chemical abstracts |
ISSN | 0734-211X |
Temas |
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Entidades |
American Vacuum Society. American Institute of Physics. |
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