Ion implantation technology : proceedings of the Sixth International Conference on Ion Implantation Technology, University of California, Berkeley, CA, USA, July 28-August 1, 1986

editors, M.I. Current ... [et al.].

Amsterdam : North-Holland, 1987.

xiv págs., págs. 83-653 : ilustraciones ; 27 cm.

Serie: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 0168-583X ; v. B21, nos. 2-4 (Mar. 1987)

Incluye indices.

Incluye referencias bibliográficas.