Catálogo Bibliográfico
LDR | ·····cam##22·····Ia#4500 |
001 | 008857 |
005 | 20060731105536.0 |
008 | 870808s1987####ne#a#####b####101#0#eng#d |
245 | 10 | $a Ion implantation technology : $b proceedings of the Sixth International Conference on Ion Implantation Technology, University of California, Berkeley, CA, USA, July 28-August 1, 1986 / $c editors, M.I. Current ... [et al.]. |
260 | ## | $a Amsterdam : $b North-Holland, $c 1987. |
300 | ## | $a xiv p., p. 83-653 : $b il. ; $c 27 cm. |
490 | 1# | $a Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, $x 0168-583X ; $v v. B21, nos. 2-4 (Mar. 1987) |
111 | 2# | $a International Conference on Ion Implantation Technology $n (6th : $d 1986 : $c University of California, Berkeley) |
700 | 1# | $a Current, Michael I. |
080 | ## | $a 621.382:061.3 |
650 | #0 | $a Ion implantation $v Congresses. |
504 | ## | $a Incluye referencias bibliográficas. |
040 | ## | $a CLU $c CLU $d OCL $b spa $d arbccab |
500 | ## | $a Incluye indices. |