|
International Conference on Ion Implantation Technology (7th : 1988 : Kyoto, Japan)
Ion implantation technology : proceedings of the Seventh International Conference on Ion Implantation Technology, Kyoto, Japan, June 7-10, 1988 / edited under the responsibility of T. Takagi ... [et al.].
— Amsterdam : North-Holland, 1989. xxiv, 994 p. : il. ; 27 cm. — (Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, ISSN 0168-583X ; v. B37/38 (Feb. 1989))
Incluye índice.
Incluye referencias bibliográficas.
|