TK7871.85 .I57623 1994
621.3815/2
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International Conference on Ion Implantation Technology (10th : 1994 : Catania, Italy)
Ion implantation technology-94 : proceedings of the Tenth International Conference on Ion Implantation Technology, Catania, Italy, June 13-17, 1994 / editors, Salvatore Coffa ... [et al.].
— Amsterdam ; New York : North-Holland, 1995. xvii, 1012 p. : il. ; 27 cm.
"Part 1 (pp. 1-440) reprinted from: Nuclear instruments and methods in physics research, Section B: Beam interactions with materials and atoms, vol. B96, 1-2"—t.p. verso.
Incluye índice.
Incluye referencias bibliográficas.
ISBN 0444821945 (acid-free paper)
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