TK7871.85 .I5762 1976
621.3815/2
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International Conference on Ion Implantation in Semiconductors and Other Materials (5th : 1976 : Boulder, Colo.)
Ion Implantation in semiconductors, 1976 / edited by Fred Chernow and James A. Borders and David K. Brice.
— New York : Plenum Press, c1977. xiv, 754 p. : il. ; 26 cm.
Incluye índice.
Incluye referencias bibliográficas.
ISBN 0306362562
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