Proceedings of the AVS Symposium on Ion Implantation : New Prospects from Materials Modification, 14 June 1978, T. J. Watson Research Center, Yorktown Heights, New York

special editor for the proceedings, W.L. Brown.

New York : Published for the American Vacuum Society by the American Institute of Physics, 1978.

p. 1629-1685 : ilustraciones ; 30 cm.

Serie: Journal of Vacuum Science and Technology ; 5 (1978)

ISBN: 0883182467

Incluye referencias bibliográficas e índice.