Proceedings of the AVS Symposium on Ion Implantation : New Prospects from Materials Modification, 14 June 1978, T. J. Watson Research Center, Yorktown Heights, New York / special editor for the proceedings, W.L. Brown.
Publicación
New York : Published for the American Vacuum Society by the American Institute of Physics, 1978.
Detalles físicos
p. 1629-1685 : ilustraciones ; 30 cm.
Colección
Journal of Vacuum Science and Technology ; 5 (1978)
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