Proceedings of the Thirteenth Annual Symposium of the Greater New York Chapter of the AVS on plasma and ion-beam processing, 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, New York

special editors for the proceesings, Roger Kelly and J.J. Cuomo ; program committee, J.J. Cuomo ... [et al.] ; workshop aids, V.A. Fastiggi, R.J. Cuomo, and S.M. Kelly.

New York : American Institute of Physics, 1982.

p. 725-815 : ilustraciones ; 29 cm.

Serie: Journal of vacuum science and technology ; v. 21, no. 3

ISBN: 0883184052

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