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Proceedings of the Thirteenth Annual Symposium of the Greater New York Chapter of the AVS on plasma and ion-beam processing, 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, New York / special editors for the proceesings, Roger Kelly and J.J. Cuomo ; program committee, J.J. Cuomo ... [et al.] ; workshop aids, V.A. Fastiggi, R.J. Cuomo, and S.M. Kelly.
— New York : American Institute of Physics, 1982. p. 725-815 : il. ; 29 cm. — (Journal of vacuum science and technology ; v. 21, no. 3)
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ISBN 0883184052
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