Catálogo Bibliográfico
LDR | ·····cam##22·····Ia#4500 |
001 | 008849 |
005 | 20060731104850.0 |
008 | 850419s1985####ne#a#####b####100#0#eng#d |
245 | 10 | $a Ion implantation : $b equipment & techniques : proceedings of the Fifth International Conference on Ion Implantation Equipment & Techniques, Smugglers' Notch, Jeffersonville VT, USA, July 23-27, 1984 / $c editors, J.F. Ziegler, R.L. Brown. |
260 | ## | $a Amsterdam : $b North-Holland, $c 1985. |
300 | ## | $a xiv, 451 p. : $b il. ; $c 27 cm. |
504 | ## | $a Incluye referencias bibliográficas. |
111 | 2# | $a International Conference on Ion Implantation: Equipment and Techniques $n (5th : $d 1984 : $c Jeffersonville, Vt.) |
700 | 1# | $a Ziegler, J. F. $q (James F.) |
700 | 1# | $a Brown, R. L. |
080 | ## | $a 621.382:061.3 |
650 | #0 | $a Ion implantation $v Congresses. |
650 | #0 | $a Semiconductor doping $v Congresses. |
490 | 1# | $a Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, $v v. B6, nos. 1, 2 $x 0168-583X ; |
040 | ## | $a CLU $c CLU $d OCL $b spa $d arbccab |