Título/responsables | Ion implantation : equipment & techniques : proceedings of the Fifth International Conference on Ion Implantation Equipment & Techniques, Smugglers' Notch, Jeffersonville VT, USA, July 23-27, 1984 / editors, J.F. Ziegler, R.L. Brown. |
Publicación |
Amsterdam : North-Holland, 1985. |
Detalles físicos |
xiv, 451 págs. : ilustraciones ; 27 cm. |
Colección | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, ISSN 0168-583X ; v. B6, nos. 1, 2
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Notas |
- Incluye referencias bibliográficas.
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Temas |
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Nombres |
Ziegler, J. F. (James F.)
Brown, R. L. |
Reunión |
International Conference on Ion Implantation: Equipment and Techniques (5th : 1984 : Jeffersonville, Vt.) |
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NUCL. INSTRUM. METH. PHYS. RES. B 1984 |
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